Micro-channel in Ltcc
نویسندگان
چکیده
The paper is focused on the micro-channel in LTCC (Low Temperature Co-fired Ceramics), which is one of the methods used for the creation of a fluid sensor. The sensor is composed of a mechanical and electrical part. The mechanical part is 3D structure, where are particular layers lamination on itself. There are many shapes, which creation results micro-channel after lamination and sintering. These shapes are fabricated by laser machine. The main aim of the work is to create the channel of a defined shape and size. It is very difficult because LTCC substrate change size during of sintering. This change can be up to 20 percent in all coordinate. The electrical part comprises electrochemical sensor which was created using thick-films sensors technology.
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